Turret
The TURRET is an automatically driven multiple objective inspection system. Equipped with up to 4 objectives it is used as an OEM inspection sub-system in metrology tools for the micro-electronics industry.
Key characteristics:
- Plug & play OEM optical sub-system (optics, mechanics, electronics)
- Multi-objective, camera and motor set-up for automatic objective positioning
- Designed for back-end inspection of Integrated Circuits
- 300 units manufactured since 2009
Specifications:
- Up to 4 objectives in one turret
- Image quality controlled by through-focus MTF (every objective)
- Delivered with calibration certificate (centered position for each objective)
- Dust free (clean room assembly)
Hype Camera
Based on a proprietary design, HYPE is a robust hyperspectral camera, insensitive to vibrations, suited for biological and chemical imaging. Connected to a microscope it extracts fluorescence or Raman information from images with adjustable spectral resolution.
Key characteristics:
- Common path interferometer architecture
- High spectral resolution (VNIR or SWIR)
- Hypercube acquisition
- Flexible and robust
- Suitable for 2D Raman spectroscopy
Specifications:
- Spectral range: 400…1000nm (VNIR); 900…1700nm (SWIR)
- Spectral resolution: 20cm-1 or
- 0.32nm @400nm (VNIR)
- 5.8nm @1700nm (SWIR)
- Acquisition time: 112 sec (20cm-1); 11 sec (200cm-1)
- Field-Of-View: adjustable by imaging lens
- Excitation wavelength: selectable (any wavelength based on the application)
- Promoting innovation at customers with innovative optical concepts
- Supporting new product development with custom optical designs
- Derisking customer by multi-stage project management
- Getting a Proof-Of-Concept with breadboard experiments
- POC validation by prototyping
- Industrialization and serial production supported by ISO 9001 and EN 9100 quality system